Atomic layer deposited protective coatings for micro-electromechanical systems Journal Article uri icon

Overview

publication date

  • January 15, 2003

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 12:40 PM

Full Author List

  • Hoivik ND; Elam JW; Linderman RJ; Bright VM; George SM; Lee YC

author count

  • 6

citation count

  • 120

Other Profiles

International Standard Serial Number (ISSN)

  • 0924-4247

Additional Document Info

start page

  • 100

end page

  • 108

volume

  • 103

issue

  • 1-2

number

  • PII S0924-4247(02)00319-9