Atmospheric pressure spatial atomic layer deposition web coating with in situ monitoring of film thickness Journal Article uri icon

Overview

publication date

  • January 1, 2014

has restriction

  • closed

Date in CU Experts

  • June 17, 2014 4:26 AM

Full Author List

  • Yersak AS; Lee YC; Spencer JA; Groner MD

author count

  • 4

citation count

  • 39

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

volume

  • 32

issue

  • 1

number

  • ARTN 01A130