Atomic layer deposition (ALD) technology for reliable RF MEMS Conference Proceeding

Overview

CU Boulder Authors

publication date

June 2, 2002

has restriction

closed

Date in CU Experts

May 28, 2014 4:03 AM

Full Author List

Hoivik N; Elam JW; George SM; Gupta KC; Bright VM; Lee YC

Full Editor List

Hamilton R

author count

6

citation count

17

published in

IEEE MTT-S International Microwave Symposium digest. IEEE MTT-S International Microwave Symposium Journal

presented at event

IEEE MTT-S International Microwave Symposium Conference

Other Profiles

International Standard Serial Number (ISSN)

0149-645X

Electronic International Standard Serial Number (EISSN)

2576-7216

Digital Object Identifier (DOI)

https://doi.org/10.1109/mwsym.2002.1011881

International Standard Book Number (ISBN) 10

0-7803-7239-5

Additional Document Info

start page

1229

end page

1232