Atomic layer deposition of conformal dielectric and protective coatings for released micro-electromechanical devices Conference Proceeding

Overview

CU Boulder Authors

publication date

January 20, 2002

Date in CU Experts

May 28, 2014 4:03 AM

Full Author List

Hoivik N; Elam J; Linderman R; Bright VM; George S; Lee YC

author count

6

citation count

10

published in

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Journal

presented at event

15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002) Conference

Other Profiles

International Standard Serial Number (ISSN)

1084-6999

International Standard Book Number (ISBN) 10

0-7803-7185-2

Additional Document Info

start page

455

end page

458