Thermal atomic layer etching of cobalt using sulfuryl chloride for chlorination and tetramethylethylenediamine or trimethylphosphine for ligand addition Journal Article uri icon

Overview

publication date

  • May 1, 2023

has restriction

  • closed

Date in CU Experts

  • June 3, 2023 4:55 AM

Full Author List

  • Murdzek JA; Lii-Rosales A; George SM

author count

  • 3

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

volume

  • 41

issue

  • 3

number

  • ARTN 032603