Infrared spectroscopic study of atomic layer deposition mechanism for hafnium silicate thin films using HfCl2[N(SiMe3)2]2 and H2O Journal Article uri icon

Overview

publication date

  • November 1, 2004

has restriction

  • green

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • Kang SW; Rhee SW; George SM

author count

  • 3

citation count

  • 18

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

start page

  • 2392

end page

  • 2397

volume

  • 22

issue

  • 6