Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition Journal Article uri icon

Overview

publication date

  • January 1, 2012

has restriction

  • green

Date in CU Experts

  • September 6, 2013 4:38 AM

Full Author List

  • Poodt P; Cameron DC; Dickey E; George SM; Kuznetsov V; Parsons GN; Roozeboom F; Sundaram G; Vermeer A

author count

  • 9

citation count

  • 249

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

volume

  • 30

issue

  • 1

number

  • ARTN 010802