Effect of crystallinity on thermal atomic layer etching of hafnium oxide, zirconium oxide, and hafnium zirconium oxide Journal Article uri icon

Overview

publication date

  • March 1, 2020

has restriction

  • hybrid

Date in CU Experts

  • April 7, 2020 6:12 AM

Full Author List

  • Murdzek JA; George SM

author count

  • 2

citation count

  • 28

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

volume

  • 38

issue

  • 2

number

  • ARTN 022608