Thermal atomic layer etching of silicon nitride using an oxidation and "conversion etch" mechanism Journal Article uri icon

Overview

publication date

  • March 1, 2020

Date in CU Experts

  • March 24, 2020 5:36 AM

Full Author List

  • Abdulagatov A; George SM

author count

  • 2

citation count

  • 33

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

volume

  • 38

issue

  • 2

number

  • ARTN 022607