Tungsten atomic layer deposition on polymers Journal Article

Overview

CU Boulder Authors

• Cavanagh, Andrew S
• Weimer, Alan W
• George, Steven

publication date

• July 31, 2008

has restriction

• closed

Date in CU Experts

• September 6, 2013 12:05 PM

Full Author List

• Wilson CA; McCormick JA; Cavanagh AS; Goldstein DN; Weimer AW; George SM

author count

• 6

citation count

• 63

published in

• Thin Solid Films 

Other Profiles

International Standard Serial Number (ISSN)

• 0040-6090

Digital Object Identifier (DOI)

• https://doi.org/10.1016/j.tsf.2007.11.086

Additional Document Info

start page

• 6175

end page

• 6185

volume

• 516

issue

• 18