Thermal atomic layer etching of HfO2 using HF for fluorination and TiCl4 for ligand-exchange Journal Article uri icon

Overview

publication date

  • November 1, 2018

has restriction

  • closed

Date in CU Experts

  • December 6, 2018 12:18 PM

Full Author List

  • Lee Y; George SM

author count

  • 2

citation count

  • 32

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

volume

  • 36

issue

  • 6

number

  • ARTN 061504