A model study of capacitive micromachined ultrasonic transducers fabricated using atomic layer deposition process
Journal Article
Overview
publication date
- January 1, 2004
has subject area
- Chemical Phenomena - Crystallization
- Chemistry Techniques, Analytical - Crystallization
- Computing Methodologies - Computer-Aided Design
- Environment and Public Health - Feasibility Studies
- Equipment Design
- Equipment Failure Analysis
- Health Care Evaluation Mechanisms - Feasibility Studies
- Information Science - Computer-Aided Design
- Investigative Techniques - Feasibility Studies
- Investigative Techniques - Feasibility Studies
- Manufactured Materials
- Miniaturization
- Miniaturization - Nanotechnology
- Models, Theoretical
- Natural Science Disciplines - Nanotechnology
- Transducers
- Ultrasonography
Date in CU Experts
- January 31, 2017 3:50 AM
Full Author List
- Liu LL; Mukdadi OM; Hertzberg JR; Shandas R
author count
- 4
published in
Other Profiles
International Standard Serial Number (ISSN)
- 1054-0032
Additional Document Info
start page
- 142
end page
- 148
volume
- 449