Atomic layer deposition of boron nitride using sequential exposures of BCl3 and NH3 Journal Article
Overview
publication date
- June 24, 2002
has restriction
- closed
Date in CU Experts
- September 3, 2013 12:55 PM
Full Author List
- Ferguson JD; Weimer AW; George SM
author count
- 3
citation count
- 100
published in
Other Profiles
International Standard Serial Number (ISSN)
- 0040-6090
Digital Object Identifier (DOI)
Additional Document Info
start page
- 16
end page
- 25
volume
- 413
issue
- 1-2
number
- PII S0040-6090(02)00431-5