Photoinhibited superresolution lithography: overcoming chemical blur Conference Proceeding

Overview

CU Boulder Authors

McLeod, Robert R

publication date

February 24, 2014

has restriction

closed

Date in CU Experts

August 21, 2014 4:33 AM

Full Author List

Forman DL; McLeod RR

Full Editor List

Resnick DJ; Bencher C

author count

2

citation count

2

published in

Proceedings of SPIE Journal

presented at event

Conference on Alternative Lithographic Technologies VI Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Electronic International Standard Serial Number (EISSN)

1996-756X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.2063254

Additional Document Info

volume

9049