Ultrahigh 22 nm resolution EUV coherent diffraction imaging using a tabletop 13 nm high harmonic source
Conference Proceeding
Overview
publication date
- February 13, 2012
has restriction
- closed
Date in CU Experts
- May 28, 2014 5:05 AM
Full Author List
- Seaberg MD; Adams DE; Zhang B; Gardner DF; Murnane MM; Kapteyn HC
Full Editor List
- Starikov A
author count
- 6
published in
- Proceedings of SPIE Journal
presented at event
Other Profiles
International Standard Serial Number (ISSN)
- 0277-786X
Digital Object Identifier (DOI)
Additional Document Info
volume
- 8324