Characterization of ultrathin films by laser-induced sub-picosecond photoacoustics with coherent extreme ultraviolet detection Conference Proceeding

Overview

CU Boulder Authors

publication date

February 13, 2012

has restriction

closed

Date in CU Experts

May 28, 2014 5:04 AM

Full Author List

Li Q; Hoogeboom-Pot K; Nardi D; Deeb C; King S; Tripp M; Anderson E; Murnane MM; Kapteyn HC

Full Editor List

Starikov A

author count

9

citation count

2

published in

Proceedings of SPIE Journal

presented at event

Conference on Metrology, Inspection, and Process Control for Microlithography XXVI Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Electronic International Standard Serial Number (EISSN)

1996-756X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.916866

Additional Document Info

volume

8324