Probing limits of acoustic nanometrology using coherent extreme ultraviolet light Conference Proceeding

Overview

CU Boulder Authors

publication date

February 25, 2013

has restriction

closed

Date in CU Experts

May 28, 2014 5:04 AM

Full Author List

Nardi D; Hoogeboom-Pot KM; Hernandez-Charpak JN; Tripp M; King SW; Anderson EH; Murnane MM; Kapteyn HC

Full Editor List

Starikov A; Cain JP

author count

8

citation count

8

published in

Proceedings of SPIE Journal

presented at event

27th Conference on Metrology, Inspection, and Process Control for Microlithography Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Electronic International Standard Serial Number (EISSN)

1996-756X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.2011194

Additional Document Info

volume

8681