Low stress atomic layer deposited alumina for nano electro mechanical systems
Conference Proceeding
Overview
publication date
- June 5, 2005
Date in CU Experts
- May 28, 2014 4:57 AM
Full Author List
- Tripp MK; Stampfer C; Herrmann CF; Hierold C; George S; Bright VM
author count
- 6
citation count
- 5
presented at event
Other Profiles
International Standard Book Number (ISBN) 10
- 0-7803-8994-8
Additional Document Info
start page
- 851
end page
- 854