Polymer-derived ceramic MEMS: Science and technology Conference Proceeding
Overview
publication date
- April 7, 2003
Date in CU Experts
- May 28, 2014 4:47 AM
Full Author List
- Liew LA; Raj R
author count
- 2
citation count
- 1
published in
- Proceedings of SPIE Journal
presented at event
Other Profiles
International Standard Serial Number (ISSN)
- 0277-786X
Electronic International Standard Serial Number (EISSN)
- 1996-756X
International Standard Book Number (ISBN) 10
- 0-8194-5105-3
Additional Document Info
start page
- 246
end page
- 251
volume
- 5231