Materials development for PhotoINhibited SuperResolution (PINSR) lithography Conference Proceeding

Overview

CU Boulder Authors

McLeod, Robert R

publication date

January 24, 2012

has restriction

closed

Date in CU Experts

May 28, 2014 4:44 AM

Full Author List

Forman DL; Heuvelman GL; McLeod RR

Full Editor List

Schoenfeld WV; Rumpf RC; VonFreymann G

author count

3

citation count

2

published in

Proceedings of SPIE Journal

presented at event

Conference on Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.908512

Additional Document Info

volume

8249