Properties of atomic layer deposited Al2O3/ZnO dielectric films grown at low temperature for RF MEMS
Conference Proceeding
Overview
publication date
- January 25, 2005
has restriction
- closed
Date in CU Experts
- May 28, 2014 4:05 AM
Full Author List
- Herrmann CF; DelRio FW; George SM; Bright VM
Full Editor List
- Maher MA; Stewart HD
author count
- 4
citation count
- 19
published in
- Proceedings of SPIE Journal
presented at event
Other Profiles
International Standard Serial Number (ISSN)
- 0277-786X
Digital Object Identifier (DOI)
International Standard Book Number (ISBN) 10
- 0-8194-5689-6
Additional Document Info
start page
- 159
end page
- 166
volume
- 5715