Atomic layer deposition of thin films using sequential surface reactions Conference Proceeding uri icon

Overview

publication date

  • January 1, 2000

Date in CU Experts

  • May 28, 2014 4:05 AM

Full Author List

  • George SM; Ferguson JD; Klaus JW

author count

  • 3

citation count

  • 3

Other Profiles

International Standard Serial Number (ISSN)

  • 0272-9172

International Standard Book Number (ISBN) 10

  • 1-55899-524-2

Additional Document Info

start page

  • 93

end page

  • 101

volume

  • 616