WAFER-LEVEL PROCESSING FOR POLYMER-BASED PLANAR MICRO CRYOGENIC COOLERS Conference Proceeding

Overview

CU Boulder Authors

Lee, Y. C.

publication date

January 29, 2012

Date in CU Experts

May 28, 2014 4:03 AM

Full Author List

Wang YD; Lewis R; Lin M-H; Radebaugh R; Lee YC

author count

5

citation count

1

published in

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Journal

presented at event

25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Conference

Other Profiles

International Standard Serial Number (ISSN)

1084-6999