Tolerance and precision study for solder self-assembled MEMS Conference Proceeding

Overview

CU Boulder Authors

publication date

May 22, 2000

has restriction

closed

Date in CU Experts

May 28, 2014 4:03 AM

Full Author List

Harsh KF; Kladitis PE; Zhang YH; Dunn ML; Bright VM; Lee YC

Full Editor List

Syms RRA

author count

6

citation count

3

published in

Proceedings of SPIE Journal

presented at event

Conference on Micro-Opto-Electro-Mechanical Systems Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.397933

International Standard Book Number (ISBN) 10

0-8194-3712-3

Additional Document Info

start page

173

end page

191

volume

4075