Atomic Layer Deposition/Molecular Layer Deposition for Packaging and Interconnect of N/MEMS Conference Proceeding uri icon

Overview

publication date

  • January 24, 2011

has restriction

  • closed

Date in CU Experts

  • May 28, 2014 4:03 AM

Full Author List

  • Lee YC

Full Editor List

  • GarciaBlanco S; Ramesham R

author count

  • 1

citation count

  • 2

Other Profiles

International Standard Serial Number (ISSN)

  • 0277-786X

Electronic International Standard Serial Number (EISSN)

  • 1996-756X

Additional Document Info

volume

  • 7928