Atomic layer deposition of thin films using sequential surface reactions
Chapter
Overview
publication date
- January 1, 2000
has restriction
- closed
Date in CU Experts
- February 3, 2014 12:38 PM
Full Author List
- George SM; Ferguson JD; Klaus JW
Full Editor List
- Wadley HNG; Gilmer GH; Barker WG
author count
- 3
citation count
- 5
published in
- MRS Online Proceedings Library Journal
Other Profiles
Digital Object Identifier (DOI)
International Standard Book Number (ISBN) 10
- 1-55899-524-2
Additional Document Info
start page
- 93
end page
- 101
volume
- 616