Dynamic imaging of periodic structures using extreme-ultraviolet scatterometry Journal Article uri icon

Overview

publication date

  • August 11, 2026

Date in CU Experts

  • August 30, 2026 3:58 AM

Full Author List

  • McBennett B; Tanksalvala M; Nelson EE; Culman TH; Li Y; Liu J; Berk E; Beardo A; Harford J; Shaw JM

author count

  • 13

citation count

  • 0

Other Profiles

International Standard Serial Number (ISSN)

  • 2331-7019

Additional Document Info

volume

  • 26

issue

  • 2

number

  • ARTN 024024