Atomic layer etching of metal-polar aluminum nitride and gallium nitride using SF6 and Cl2/BCl3 plasma Journal Article uri icon

Overview

publication date

  • July 22, 2026

Date in CU Experts

  • August 3, 2026 2:15 AM

Full Author List

  • Panagiotopoulos R; Collings M; Lonergan P; Dill JE; Clark J; Jena D; George SM; Xing HG

author count

  • 8

citation count

  • 0

Other Profiles

International Standard Serial Number (ISSN)

  • 2050-7526

Electronic International Standard Serial Number (EISSN)

  • 2050-7534