Deposition of TiN and Ti(O,C,N) hard coatings by a plasma assisted chemical vapor deposition process Journal Article uri icon

Overview

publication date

  • November 1, 1986

Date in CU Experts

  • May 6, 2026 4:02 AM

Full Author List

  • Mayr P; Stock H

author count

  • 2

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

start page

  • 2726

end page

  • 2730

volume

  • 4

issue

  • 6