Film and surface stress during Al₂O₃ and AlF₃ atomic layer deposition using in situ wafer curvature measurements Journal Article

Overview

CU Boulder Authors

publication date

April 1, 2026

Date in CU Experts

December 24, 2025 10:30 AM

Full Author List

Vanfleet RB; Sortino E; Cavanagh AS; Bright VM; George SM

author count

5

citation count

1

published in

Applied Surface Science Journal

Other Profiles

International Standard Serial Number (ISSN)

0169-4332

Electronic International Standard Serial Number (EISSN)

1873-5584

Digital Object Identifier (DOI)

https://doi.org/10.1016/j.apsusc.2025.165642

Additional Document Info

volume

724

number

ARTN 165642