Lab-based multi-wavelength EUV diffractometry for critical dimension metrology Conference Proceeding

Overview

CU Boulder Authors

publication date

February 24, 2025

Date in CU Experts

August 1, 2025 10:10 AM

Full Author List

Barnes BM; Chew A; Jenkins NW; Shao Y; Sohn MY; Kline RJ; Sunday DF; Balakrishnan PP; Germer TA; Grantham SE

Full Editor List

Sendelbach MJ; Schuch NG

author count

15

citation count

0

published in

Proceedings of SPIE Journal

presented at event

2025 Conference on Metrology Inspection and Process Control-Annual Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Electronic International Standard Serial Number (EISSN)

1996-756X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.3050342

International Standard Book Number (ISBN) 13

978-1-5106-8638-0

Additional Document Info

volume

13426