Optimized EUV Scatterometry Measurements with Tunable High Harmonic Generation and the Fisher Information Matrix Conference Proceeding

Overview

CU Boulder Authors

publication date

February 24, 2025

Date in CU Experts

August 1, 2025 10:10 AM

Full Author List

Klein C; Jenkins N; Shao Y; Li Y; Park S; Kim W; Kapteyn H; Murnane M

Full Editor List

Sendelbach MJ; Schuch NG

author count

8

citation count

0

published in

Proceedings of SPIE Journal

presented at event

2025 Conference on Metrology Inspection and Process Control-Annual Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Electronic International Standard Serial Number (EISSN)

1996-756X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.3051113

International Standard Book Number (ISBN) 13

978-1-5106-8638-0

Additional Document Info

volume

13426