Thermal Atomic Layer Etching of CoO, ZnO, Fe2O3, and NiO by Chlorination and Ligand Addition Using SO2Cl2 and Tetramethylethylenediamine Journal Article uri icon

Overview

publication date

  • March 14, 2023

has restriction

  • closed

Date in CU Experts

  • March 25, 2023 12:55 PM

Full Author List

  • Murdzek JA; Johnson VL; Cavanagh AS; Fischer A; Lill T; Sharma S; Partridge JL; George SM

author count

  • 8

citation count

  • 4

Other Profiles

International Standard Serial Number (ISSN)

  • 0897-4756

Electronic International Standard Serial Number (EISSN)

  • 1520-5002

Additional Document Info

start page

  • 2058

end page

  • 2068

volume

  • 35

issue

  • 5