Electron-Enhanced Atomic Layer Deposition of Titanium Nitride Films Using an Ammonia Reactive Background Gas Journal Article uri icon

Overview

publication date

  • November 8, 2022

has restriction

  • closed

Date in CU Experts

  • December 3, 2022 10:20 AM

Full Author List

  • Sobell ZC; George SM

author count

  • 2

citation count

  • 3

Other Profiles

International Standard Serial Number (ISSN)

  • 0897-4756

Electronic International Standard Serial Number (EISSN)

  • 1520-5002

Additional Document Info

start page

  • 9624

end page

  • 9633

volume

  • 34

issue

  • 21