Thermal Atomic Layer Etching of Al2O3 Using Sequential HF and BCl3 Exposures: Evidence for Combined Ligand-Exchange and Conversion Mechanisms Journal Article uri icon

Overview

publication date

  • July 26, 2022

has restriction

  • closed

Date in CU Experts

  • August 13, 2022 6:35 AM

Full Author List

  • Cano AM; Partridge JL; George SM

author count

  • 3

citation count

  • 6

Other Profiles

International Standard Serial Number (ISSN)

  • 0897-4756

Electronic International Standard Serial Number (EISSN)

  • 1520-5002

Additional Document Info

start page

  • 6440

end page

  • 6449

volume

  • 34

issue

  • 14