Volatile Products from Ligand Addition of P(CH3)(3)to NiCl2, PdCl2,and PtCl2: Pathway for Metal Thermal Atomic Layer Etching Journal Article uri icon

Overview

publication date

  • May 19, 2022

has restriction

  • closed

Date in CU Experts

  • July 2, 2022 3:51 AM

Full Author List

  • Lii-Rosales A; Johnson VL; Sharma S; Fischer A; Lill T; George SM

author count

  • 6

citation count

  • 3

Other Profiles

International Standard Serial Number (ISSN)

  • 1932-7447

Electronic International Standard Serial Number (EISSN)

  • 1932-7455

Additional Document Info

start page

  • 8287

end page

  • 8295

volume

  • 126

issue

  • 19