Atomic layer etching of ferroelectric hafnium zirconium oxide thin films enables giant tunneling electroresistance Journal Article

Overview

CU Boulder Authors

George, Steven

publication date

March 21, 2022

has restriction

closed

Date in CU Experts

May 7, 2022 4:06 AM

Full Author List

Hoffmann M; Murdzek JA; George SM; Slesazeck S; Schroeder U; Mikolajick T

author count

6

citation count

11

published in

Applied Physics Letters Journal

Other Profiles

International Standard Serial Number (ISSN)

0003-6951

Electronic International Standard Serial Number (EISSN)

1077-3118

Digital Object Identifier (DOI)

https://doi.org/10.1063/5.0084636

Additional Document Info

volume

120

issue

12

number

ARTN 122901