CONTROLLED GROWTH OF SIO2 BY ATOMIC LAYER PROCESSING USING SICL4 AND H2O Journal Article uri icon

Overview

publication date

  • March 28, 1993

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • GEORGE SM; WISE ML; COON PA; OKADA LA

author count

  • 4

Other Profiles

International Standard Serial Number (ISSN)

  • 0065-7727

Additional Document Info

start page

  • 165

end page

  • COLL

volume

  • 205