Surface poisoning in the nucleation and growth of palladium atomic layer deposition with Pd(hfac)2 and formalin Journal Article uri icon

Overview

publication date

  • June 1, 2011

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • Goldstein DN; George SM

author count

  • 2

citation count

  • 47

Other Profiles

International Standard Serial Number (ISSN)

  • 0040-6090

Additional Document Info

start page

  • 5339

end page

  • 5347

volume

  • 519

issue

  • 16