Surface poisoning in the nucleation and growth of palladium atomic layer deposition with Pd(hfac)2 and formalin Journal Article
Overview
publication date
- June 1, 2011
Date in CU Experts
- September 6, 2013 4:39 AM
Full Author List
- Goldstein DN; George SM
author count
- 2
citation count
- 47
published in
- Thin Solid Films Journal
Other Profiles
International Standard Serial Number (ISSN)
- 0040-6090
Digital Object Identifier (DOI)
Additional Document Info
start page
- 5339
end page
- 5347
volume
- 519
issue
- 16