Atomic Layer Deposition of MgO Using Bis(ethylcyclopentadienyl)magnesium and H2O Journal Article uri icon

Overview

publication date

  • February 5, 2009

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • Burton BB; Goldstein DN; George SM

author count

  • 3

citation count

  • 75

Other Profiles

International Standard Serial Number (ISSN)

  • 1932-7447

Additional Document Info

start page

  • 1939

end page

  • 1946

volume

  • 113

issue

  • 5