High-speed, sub-15 nm feature size thermochemical nanolithography
Journal Article
Overview
publication date
- April 1, 2007
has subject area
has restriction
- closed
Date in CU Experts
- September 9, 2021 3:03 AM
Full Author List
- Szoszkiewicz R; Okada T; Jones SC; Li T-D; King WP; Marder SR; Riedo E
author count
- 7
citation count
- 157
published in
Other Profiles
International Standard Serial Number (ISSN)
- 1530-6984
Digital Object Identifier (DOI)
Additional Document Info
start page
- 1064
end page
- 1069
volume
- 7
issue
- 4