Tantalum nitride atomic layer deposition using (tert-butylimido) tris(diethylamido) tantalum and hydrazine Journal Article uri icon

Overview

publication date

  • January 1, 2008

has restriction

  • bronze

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • Burton BB; Lavoie AR; George SM

author count

  • 3

citation count

  • 66

Other Profiles

International Standard Serial Number (ISSN)

  • 0013-4651

Electronic International Standard Serial Number (EISSN)

  • 1945-7111

Additional Document Info

start page

  • D508

end page

  • D516

volume

  • 155

issue

  • 7