ATOMIC LAYER CONTROLLED DEPOSITION OF SIO2 AND AL2O3 USING ABAB - BINARY REACTION SEQUENCE CHEMISTRY Journal Article
Overview
publication date
- December 1, 1994
has restriction
- closed
Date in CU Experts
- September 6, 2013 4:39 AM
Full Author List
- GEORGE SM; SNEH O; DILLON AC; WISE ML; OTT AW; OKADA LA; WAY JD
author count
- 7
citation count
- 82
published in
Other Profiles
International Standard Serial Number (ISSN)
- 0169-4332
Digital Object Identifier (DOI)
Additional Document Info
start page
- 460
end page
- 467
volume
- 82-3