Atomic layer deposition of SiO2 using catalyzed and uncatalyzed self-limiting surface reactions Journal Article uri icon

Overview

publication date

  • June 1, 1999

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • Klaus JW; Sneh O; Ott AW; George SM

author count

  • 4

citation count

  • 48

Other Profiles

International Standard Serial Number (ISSN)

  • 0218-625X

Additional Document Info

start page

  • 435

end page

  • 448

volume

  • 6

issue

  • 3-4