FTIR STUDIES OF TRICHLOROGERMANE AND TRICHLOROSILANE DECOMPOSITION ON SILICON SURFACES Journal Article uri icon

Overview

publication date

  • March 28, 1993

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • DILLON AC; WISE ML; ROBINSON MB; GEORGE SM

author count

  • 4

Other Profiles

International Standard Serial Number (ISSN)

  • 0065-7727

Additional Document Info

start page

  • 282

end page

  • COLL

volume

  • 205