Al(2)O(3) thin film growth on Si (100) using binary reaction sequence chemistry (vol 292, pg 135, 1997) Journal Article
Overview
publication date
- August 31, 2009
has restriction
- closed
Date in CU Experts
- September 6, 2013 4:39 AM
Full Author List
- Ott AW; Klaus JW; Johnson JM; George SM
author count
- 4
citation count
- 5
published in
Other Profiles
International Standard Serial Number (ISSN)
- 0040-6090
Digital Object Identifier (DOI)
Additional Document Info
start page
- 5950
end page
- 5950
volume
- 517
issue
- 20