Nucleation and growth during tungsten atomic layer deposition on SiO2 surfaces Journal Article uri icon

Overview

publication date

  • May 1, 2001

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • Elam JW; Nelson CE; Grubbs RK; George SM

author count

  • 4

citation count

  • 81

Other Profiles

International Standard Serial Number (ISSN)

  • 0040-6090

Electronic International Standard Serial Number (EISSN)

  • 1879-2731

Additional Document Info

start page

  • 41

end page

  • 52

volume

  • 386

issue

  • 1