SiO2 film growth at low temperatures by catalyzed atomic layer deposition in a viscous flow reactor Journal Article uri icon

Overview

publication date

  • November 22, 2005

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 4:38 AM

Full Author List

  • Du Y; Du X; George SM

author count

  • 3

citation count

  • 57

Other Profiles

International Standard Serial Number (ISSN)

  • 0040-6090

Additional Document Info

start page

  • 43

end page

  • 53

volume

  • 491

issue

  • 1-2