Conformal coating on ultrahigh-aspect-ratio nanopores of anodic alumina by atomic layer deposition Journal Article uri icon

Overview

publication date

  • September 9, 2003

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 4:38 AM

Full Author List

  • Elam JW; Routkevitch D; Mardilovich PP; George SM

author count

  • 4

citation count

  • 547

Other Profiles

International Standard Serial Number (ISSN)

  • 0897-4756

Additional Document Info

start page

  • 3507

end page

  • 3517

volume

  • 15

issue

  • 18