Quartz Crystal Microbalance Studies of Al2O3 Atomic Layer Deposition Using Trimethylaluminum and Water at 125 °C
Journal Article
Overview
publication date
- January 28, 2010
has subject area
- Alkalies - Water
- Aluminum Compounds - Aluminum Oxide
- Anions - Water
- Chemical Phenomena - Crystallization
- Chemistry Techniques, Analytical - Crystallization
- Ecological and Environmental Phenomena - Temperature
- Ecological and Environmental Phenomena - Temperature
- Environment and Public Health - Temperature
- Environment, Controlled - Temperature
- Minerals - Quartz
- Organometallic Compounds
- Oxygen Compounds - Aluminum Oxide
- Oxygen Compounds - Quartz
- Oxygen Compounds - Water
- Silicon Compounds - Quartz
- Thermodynamics - Temperature
has restriction
- closed
Date in CU Experts
- September 6, 2013 4:38 AM
Full Author List
- Wind RA; George SM
author count
- 2
citation count
- 74
published in
Other Profiles
International Standard Serial Number (ISSN)
- 1089-5639
Digital Object Identifier (DOI)
Additional Document Info
start page
- 1281
end page
- 1289
volume
- 114
issue
- 3